1真空室概述
ZHENKONGXITONGDEHEXINSHIZHENKONGSHI，TASHIZHENDUIJUTIYINGYONGLIANGSHENDINGZUODE。TABAOKUOYINGYONGBINGJIANGQIKEKAODIYUWAIBUFENLIHUOFANGZHIHUANJINGSHOUNEIBULIUCHENGYINGXIANG。♏BUGUANGANZAOGUOCHENGSHIFOUXUYAOGAOZHENKONGHUANJING，DENGLIZITIGUOCHENGDOUXUYAOZAI♋ZHONGHUOGAOZHENKONGHUANJINGXIAJINXING，ERBIAOMIANYANJIUYEXUYAOZAIGAOZHENKONGHUANJINGXIAJINXING：–ZHENKONGSHIBIXUSHIZHONGJIXIEDICHENGSHOUQIYUDAQIDEYACHA。
OUMENGBIAOZHUNGUIDINGZHENKONGRONGQIBUSHOURENHEJIYUSHEJIHEJISUANDEJUTIZHUNZEDEYINGXIANG。TAMENBUSHIYALISHEBEI（YALISHEBEIZHILING2014/68/EUSHIYONGYUJUYOUNEIBUYALIDAYU500hPaDEBUJIAN）🎐，ERQIEGENJUJIXIEZHILING2006/42/ECTAMENBUSHUYUJIQI。RANERꦬ，TAMENBIXUYIANQUANKEKAODEFANGSHIJINXINGSHEJI、JISUANHESHENGCHAN，BINGZAIJIAOFUQIANJINXINGCESHI。
YUANZHUGUAN、QIUTI、PINGBANHUOMOJUPEIJIANBIHOUDEJISUAN，RUPANXINGDI，KESHIYONGAD-2000SHOUCEJINXING。AD2000GUIDINGSHIJISHANGSHI“YALIRONGQIGONGZUOWEIYUANHUI”SHEJIZHIDINGDE，YONGYUDUIYALIRONGQIDEJISUAN，DANYEMIAOSHUFUZAITIAOJIAN“WAIBUGUOYA”。ZAIZHEI🌟LI，NINJIANGFAXIAN，LI🔜RU，JISUANSUOXUBIHOUDEFANGCHENGBAOKUOYUANZHUGUANDE“DANXINGQUQU”HUO“SUXINGBIANXING”DENG。
YOUYUJUXINGQIANGSHIHUOLEISISHEJI，BIXUJIANCHABIAOMIANPIANZHUANHECHUXIANDEZHANGLI。RUGUOTAMENGUOGAO，BIXUZENGJIABIHOUHUODUIGAIQUSHIYONGJINXINGJIAGU，RUTONGEWAIDEHANJIELEIBAN。WEICI，KEYISHIYONG𓃲CAIYONGYOUXIANYUANFA(FEM)ZHIXINGJIXIEJISUANDECHENGXULAIYOUHUAQIANGSHISHEJI。CHUYUNXUDEJIXIEYINGLIWAI，YEYOUBIYAOJIANCHAZAIFUZAITIAOJIAN“WAIBUHUANJING、ZHENKONGNEIBU”XIAMIFENGMIANSHIFOUHUXIANGBAOCHIQIPING。RUGUOMIFENGMIANWAIQU，KENENGFASHENGXIELOU，ZUAIQIANGSHI🦋DESHIYONG。


JUYOULENGQUEPOUMIANHESHUILENGFALANDEEUVGUANGYUANSHI
QIANGSHIDEJIBENXINGZHUANGTONGCHANGYOUYINGYONGJUEDING。DUIYUQIANGTI，RUKE꧑NENG，YINGGAIXUANZEYUANZHUGUAN，TAYOULIYUWULIAODETOUFANGHEXITONGDEWENDINGXING。DUIYUJIAOXIAODEGONGCHENGTONGJING，PINGDIKEMIFENGGUANCE，JIAODAZHIJINGYINGGAITONGGUOPANXINGDILAIMIFENG，YIXIANZHIWUZHITOURUHEQIANGSHIDEZHILIANG。SHILI：ZHIJINGWEI600mmDEQIANGSHIXUYAOPINGDI，DAYUESHIPANXINGDIBIHOUDESANBEI。JUYOUPEIJIANGAIDEZHUFALANYUNXUJINRUQIANGSHI，MENJIAOLIANDESHIYONGTIGAOLEYIYONGXING。WAIBUDEQIANGSHIZHIJIAOQUEBAOLEWENDINGXING，HUANSHOULUOSIHUOQIZHONGXIEKOUKESHIXIANANQUANYUNSHU。
RUGUOQIANGSHIYAOJINXINGHUIHUOHUONEIBURE♕YUANDAOZHIQIANGSHIGAIGUORE，BIXUTIGONGQIANGSHILENGQUEXITONG。ZHEIKETONGGUOHANJIELENGQUEPOUMIANHUODAMIANJIDIANBANLENGQUE（TU）HUOSHENZHI🍰ZUOWEISHUANGZHONGRONGQILAISHIXIAN。

JUYOUDIANBANLENGQUEDEKONGJIANMONISHI
2真空室加工-表面
ZHENKONGSHIHEBUJIANDENEIBIAOMIANSHIZAIGAOZHENKONGHECHAOGAOZHENKONGXIASHIXIANGONGZUOYALIDEZHONGYAOYINSU。BIXUZAI﷽GAITIAOJIANXIAJINXINGJIAGONG，YIZUIXIAOHUAYOUXIAOBIAOMIAN，BINGCHANSHENGJUYOUZUIXIAOJIEXILVDEBIAOMIAN。
ZHENKONGSHIHEBUJIANDEBIAOMIANWANGWANGSHIZAIHANJIEHEJIXIEJIAGONGHOUJINGGUOJINGXIBOLIZHUPENSHADE。JUYOUXIANDINGZHIJINGDEGAOYABOLIZHUBEICHUIDAOBIAOMIANSHANG。MIFENGMIANBUNENGBEIPENSHA，🐠SUOYIZAIPENSHAGUOCHENGZHONGYAOJIANGQIGAIZHU。ZHEIGEGUOCHENGDUIBIAOMIANJINMIFENG，SHIBIAOMIANJINGQUEQIPING，QUCHUJINBIAOMIANCENG，RUSEBAN，BINGꦦCHANSHENGZHUANGSHIXINGDEWAIGUAN。YAOPENSHADEBIAOMIANBIXUQINGJIE、WUYOUZHI，SHALIJIEZHIBIXUDINGQIGENGHUAN，TEBIESHIZAIGAIBIANCAILIAOLEIBIESHI，RUTIESUTIHEAOSHITIBUXIUGANG。
01研磨
YONGYUXIAOCHUHONGGUANCUCAODU，SHIQIWUYANGHUAPI、SHUIGOUHUOHUAHEN。ZHEIYINGGAIZAIQINGJIE、WUYOU、WUYOUZHIDEBIAOMIANSHANGJINXING，BINGQIEMOLIAOBUYINGBEIJIAGONGDAOBIAOMIANLI。GENJUCHUSHICUCAODUHEYAOQUCHUDECENGHOUDU，YINGGAICAIYONGYUELAIYUEXIDEKELI，SHIYONGHENGMOFANGFA（JI：JIAOTIYANMOFANGXIANG）ZAIJIGEBUZHOUZHONGJINXINGYANMOﷺ。YANMOTONGCHANGSHISUIHOU🐟BIAOMIANCHULI（RUDIANPAOGUANG）DEZHUNBEIBUZHOU。YANMOCHANSHENGSHIJUESHANGTONGYIDEYINXIANG。PINGJIEYIJINGXIANGDUIGUANGHUA、SUANXIDEBIAOMIAN，YANMOKEYICHANSHENGGENGDUODEZHUANGSHIXIAOGUO，ERQIEHAIKEYIZENGDABIAOMIANJI。
02刷光
YONGYUHANFENGDEHOUCHULI。SUOYONGSHUAZIBIXUYOUBUXIUGANGZHICHENG，BINGQIEBUDESHOUDAOQITA𒆙WUZHIDEWURAN，BAOZHENGWUYIWUBEIDAIDAOBIAOMIANSHANG。ZHEITONGYANGSHIYONGYUPAOGUANG。PAOGUANGHUOMOSUNKENENGBUZENGJIADAOBIAOMIANSHANGHE/HUORANHOUBIXUWANQUANQUCHU。YOUXIAODEBIAOMIANJIBUDETONGGUOWEIGUANCUCAOLAIZENGJIA。
03酸洗
SHIQINGJIEBIAOMIANDEYIZHONGYOUXIAOFANGFA。ZAZHIHEDAYUE1ZHI2µmHOUDEBIAOCENGBEIRONGJIE。XIANGGUANSUANXICANSHU，RURANSEJINONGDU、WENDUHUOSUANXISHIJIAN，BIXUYANGEZUNSHOU，YIBIMIANGUODUSUANXI。SUAN꧟XIHOU，BIXUJIZHONGCHONGXI，YIQUCHUSUANXIYEDESUOYOUCANYUWU。SUANXIGUOCHENGZHINENGLVE♌WEIGAIBIANBIAOMIANCUCAODU。
04 DIANPAOGUANG
SHIJINSHUXUANZEXINGYANGJITONGGUOSHIYONGDCDIANYUANRONGJIEDAODIANJIEYEZHONG。ZAIZHEIZHONGQINGKUANGXIA，TONGCHANGQUCHUBIAOMIAN12ZHI15µmDEKELI，YICHANSHENGJIEJINGDECHUNJINGBIAOMIAN。WEIJUNYUNDIQUCHUBIAOMIAN，BIXUPINFANDIZHIZAOSHIHEYUBUJIANDEDIANJI。ZHEISHIDEGUOCHENGBIANDEFUZAQILAI。CIWAI，CFMIFENGMIANBIXUBEIFUGAI，YINWEIZUOWEIBIANYUAN，DIANCHANGQIANGDUJUBUZENGDA，CONGERDAOZHICAILIAOQUCHUZENGJIA。ZAIUHVYONGHUZHONG，GAIGUOCHENGSHIYOUZHENGYIDE。DUIQINGJINRUBIAOMIANHUOTONGGUODIANJIEYECAN✨YUWUJINRUBIAOMIANSHANGJINXINGLETAOLUN。RUSUANXIYIYANG，ZAIDIANPAOGUANGHOU，BIXUCHEDICHONGXIBUJIAN。CIWAI，ZAIZHEIZHIHOUYINGJINXINGXIELOUCESHI，YINWEIHANFENGQUYUDEWUZHIBEIQUCHULE。GENJUXIANQIANTIAOJIAN，DIANPAOGUANGKEYIJIANSHAOYIBANDEBIAOMIANCUCAODU。
TONGCHANGQINGKUANGXIA，GENJUSHIYANHUOGUOCHENG，ZAIYONGHUHESHEJISHIZHIJIANDEDUIHUAZHONGSHEJIQIANGSHI。DANDUDINGZHI♔QIANGSHIDELINGYIXUANZESHIBIAOZHUNDEZHENKONGSHI。ZHEIXIESHIYUPEIZHIDEJICHUJIEGOU，KETONGGUOZIYOUKEXUANDEDUANKOUYUYIBUCHONG。YUWANQUANDINGZHIDEZHENKONGSHIXIANGBI，TAMENGENGJIAKUAISU、SHIHUI。
3真空室加工—清洁
QINGJIEBIAOMIANSHIZHENKONGJISHUZHONGDEXIANJUETIAOJIAN。BIXUQUCHUBIAO🌌MIANSHANGDESUOYOUZAZHI，YISHIQIZAIZHENKONGTIAOJIANXIABUJIEXI、BUCHANSHENGQITIFUHEHUOCHENJIZAIBUJIANSHANG。
ZUICHUDEYUCHULISHIBIXUDE，LIRU，YONGGAOYAQINGXIQI，YIQUCHUCUWUGOU。SUIHOU，JIANGZAI꧂DUOQIANGSHICHAOSHENGBOZHONGQINGXIBUJIAN。SHOUCIQINGJIESHIZAICHAOSHENGBOTIAOJIANXIASHIYONGTESHUDEQINGJIEJIJINXING，DUIBIAOMIANJINXINGQINGJIEHETUOZHI。WUWUZHANYOUBIAOMIANSHANGDEBIAOMIANHUOXINGJI，BINGZHANZHEZAIQINGXIYEZHONG。QINGXIYEDEpHZHIBIXUDIAOZHENGDAOSHIHEYUQIANGSHICAILIAODEFANWEI。ZAIQITAQINGXIYEZHONG，QINGJIEJITONGGUOYUCHONGXI、RANHOUYONGREQULIZISHUICHEDICHONGXICAINENGWANQUANQUCHU。ZAIZHEIZHIHOU，BIXUZAIGAOWEN、WUCHEN、WUTINGKONGQIZHONGKUAISUWANCHENGGANZAO。DAXINGQIANGSHISHIYONGZHENGQIHUOGAOYAQINGXIQIYUTESHUDEQINGXIJIJINXINGQINGXI。RANHOU，BIXUSHIYONGREDEQULIZISHUIZAICIQINGXISHUCI，ZUIHOUZAIGAOWENKONGQIZHONGJINXINGKUAISUGANZAO。
🦹QINGJIEHOU𝄹，ZHENKONGCEBIAOMIANBIXUZHINENGPEIDAIQINGJIE、BUQIMAODESHOUTAOCHUMO。SUOYONGBAOZHUANGWEIPESULIAOBOMO，QIEMIFENGMIANHEDAORENLUNKUOYONGPEMAOBAOHU。
YIQINGJIEBUJIANBIAOMIANRENGRANYOUCHUQIYUAN。ZAIUHVXIA，MINGQUEXIFUDESHUIFENZIHEZHUCUNZAIKONGQIZHONGDETINGHENSHICANYUQITIDEZUIDALAIYUAN。WEIYOUXIAODIQUCHUBIAOMIANDEZHEIXIEWUZHI，�🥀�DUIUHVQIANGSHIJINXINGJIARE。ZAIYALIXIAOYU1·10-6hPaDELIANXUPAIKONGXIA，BUJIANTONGCHANGJIAREDAO150°CZHI300°CYUE48XIAOSHI。
TONGGUOWU▨LIXIFUHUOHUAXUEXIFUZHANZHEZAIBIAOMIANDEWAILAIYUANZITONGGUOZHEIXIEGUOCHENGHUODERENENGLIANG，TAMENPINGJIEZHEIXIERELIANGKERONGJIEZHANZHEWUBINGJIANGQICONGBIAOMIANSHIFANG。CONGBIAOMIANSHIFANGDEFENZIBIXUTONGGUOZHENKONGBENGCONGXITONGZHONGQUCHU。ZAILENGQUEHOU，HUODEDEZUIZHONGYALIYIJINGXIAJIANGLEJIGELIANGJI。RUGUOQIANGSHIBEIPAIKONG，BIAOMIANHUIZAICIFUZHEFENZI。SHIYONGGANZAODANQIZUOWEIYICHUQITIBINGJIANDUANBAOLUYU꧋DAQIZHONGBINGBUNENGWANQUANFANGZHIBIAOMIANSHANGXINGCHENGSHUIZUZHI，ZHINENGJIANSHAOTA。WEIZAIRONGXUDECHOUKONGSHIJIANNEIDADAOZUIZHONGYALI，XIAOYU1·10-8hPa，ZAICIHONGKAOSHIBUKEBIMIANDE。
